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This book provides full coverage of surfaces, interfaces, and film fundamentals for microelectronics, as well as the physics and chemistry of microelectronics processing. Based on a course taught by the author for over 25 years at the University of North Carolina, this bookoffers a unique and informative blend of fundamental science, processing, and applications. Exercises and a liberal addition of application examples are provided, along with extensive references to the primary literature to guide readers in understanding microelectronic materials as well as design new materials and applications.