MEMS

This textbook provides a concise yet comprehensive introduction to microelectromechanical systems (MEMS). It covers the knowledge required for their effective application in modern engineering. The book presents the current state of the art and examines the use of MEMS in industrial settings. It draws on the content of the Microsystems Technology and Sensor Systems courses at Bielefeld University of Applied Sciences. The book bridges the gap between fabrication technology, device principles, and practical implementation.

The first part of the book introduces the materials and manufacturing technologies used in microsystems technology. Alongside the fundamentals of semiconductor processing, it presents the specialized fabrication techniques required for creating three-dimensional MEMS structures and discusses packaging solutions tailored to microsystems.

The second part focuses on MEMS sensors and actuators. MEMS sensors have become indispensable in industrial automation, medical technology, consumer electronics, and many other fields. These devices provide the accurate and reliable data needed for modern applications. Examples include process monitoring and control in manufacturing, vital sign measurement in healthcare, and motion sensing in smartphones. The book explains the operating principles, performance characteristics, and practical use of a wide range of MEMS devices. It also highlights current technological developments and emerging applications.

The final part covers essential signal processing and control algorithms for microcontrollers. These algorithms handle sensor data acquisition, evaluation, and system control. Practical examples show how to process measurement data efficiently and turn it into meaningful information for real-world applications.

This textbook combines MEMS fabrication, sensor and actuator technology, and embedded signal processing in a single volume. It serves as both a course resource for undergraduate and graduate students and a practical reference for engineers working with MEMS devices in industry.