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Helium Ion Microscopy
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572 b
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This book covers the fundamentals of the technique Helium ion microscopy including the gas field ion source, column and contrast formation. It also provides first hand information on nano-fabrication and high resolution imaging. Relevant theoretical models and the existing software packages are discussed in an extra section. The structure of the book allows the novice to get acquainted with the specifics of the technique needed to understand the more applied chapters in the second half of the volume. The expert reader will find a complete reference of the technique covering all important applications in several chapters written by the leading experts in the field. The fundamental part allows the regular HIM user to deepen his understanding of the method. A foreword by Bill Ward covering the historical developments leading the existing tool complements the content.
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